Products

1. The controlled object
The vacuum device or production process that requires control is called the controlled object. such as vacuum valves,
Vacuum pump, vacuum coating machine, vacuum heat treatment furnace, etc.
2. Measuring device
A device for measuring changes in controlled quantities. For example: vacuum gauge, thermometer, film thickness measuring instrument, etc.
3. Adjustment device (regulator)
It compares the controlled child measured by the measuring device with the given value that needs to be maintained by the vacuum process, obtains the deviation value, and performs the calculation according to the designed calculation rule, and sends out a signal to make the control actuator act to eliminate the The deviation of the control quantity from the given value. Such as analog PID (proportional, integral, differential) regulator, digital PID regulator (ie microcontroller, computer) and so on. In the vacuum degree control of the vacuum device, it is usually combined with the vacuum gauge of the measuring device and the vacuum regulating valve of the actuator to form a pressure controller.
4. Executing agency
It accepts the signal sent by the regulating device and produces a regulating effect to eliminate the deviation between the controlled quantity and the given value.
Difference. For example, the regulating valve for adjusting the degree of vacuum in the vacuum chamber and the power regulator for regulating the heating temperature belong to this type of mechanism.
5. Controlled amount
Refers to the parameters required to achieve control in the controlled object. For example: pressure, temperature, flow rate, film thickness, etc.
6. Measured value
The actual value of the controlled variable measured by the measuring device.